Title :
Hybrid-integrated laser-diode micro-external mirror fabricated by (110) silicon micromachining
Author :
Uenishi, Y. ; Tsugai, M. ; Mehregany, M.
Author_Institution :
NTT Interdisciplinary Res. Labs., Tokyo, Japan
fDate :
6/8/1995 12:00:00 AM
Abstract :
A silicon micromachined micromirror and a laser diode have been successfully integrated. The micromirror acts as an external cavity of a laser diode and was fabricated by anisotropic etching of (110) silicon in conjunction with silicon-to-glass bonding. A mirror displacement of 1.43 μm and coincidental wavelength variation of 30 Å were attained
Keywords :
adhesion; etching; laser mirrors; micromachining; optical fabrication; semiconductor lasers; silicon; (110) silicon micromachining; 1.43 mum; 30 A; Si; anisotropic etching; coincidental wavelength variation; external cavity; hybrid-integrated laser-diode micro-external mirror fabrication; laser diode; mirror displacement; silicon micromachined micromirror; silicon-to-glass bonding;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19950683
