Fabrication of a Composite Inductance Using Co-Metal Amorphous Multilayer Films

Multilayer films consisting of Co84Zr5.5Nb10.5 and Co79Zr10Mo9Ni2 amorphous layers with SiO2 intermediate layers were prepared. An inductor for use in high frequency applications was fabricated from the film samples and an Ni-Zn ferrite yoke. In order to improve the high frequency characteristics, films fabricated into stripes were studied. Films were annealed in a magnetic field and the frequency response of multilayer films was measured at frequencies from 0.01 MHz to 200 MHz. Films with stripes showed better frequency characteristics than did films without stripes. An inductor fabricated from films with stripes with a total thickness of 20 ¿m and ferrite yokes exhibited an inductance of over 10 ¿H at 1 MHz, with frequency characteristics improved over those of Ni-Zn alone.