Substrate Temperature Effect on Magnetic Properties and Microstructure of Vacuum Deposited Co-Cr Films

The authors investigated the effect of substrate temperature and substrate thickness on the magnetic properties and microstructure of vacuum-deposited Co-Cr films. The microstructure of films is sufficiently dependent on the substrate temperature that the columnar structure disappears as the temperature rises from 250°C to 290°C, causing deterioration of the film recording characteristics. The substrate thickness dependence of the film magnetic properties is small; this result is consistent with simulations of the thickness dependence of the substrate temperature during deposition.