Title : 
Thermal and Radiation Stability of Thin-Film Cermet Resistive Elements
         
        
            Author : 
Tarpley, John L.
         
        
        
        
        
        
        
            Abstract : 
Recent laboratory experiments indicate that cermet thin-film resistors consisting of an 80/20 mixture of chromium and silicon monoxide can be fabricated to high sheet resistances up to 4500 ohms per square. These films show a pronounced thermal stability of <1 ppm/°C from -50°C to +175°C. Radiation stability of the films is ¿1% variance in absolute resistance for fluences up to 1 à 1015 e/cm2 at a 1.5 MeV energy level.
         
        
            Keywords : 
Ceramics; Chromium; Energy states; Laboratories; Resistors; Semiconductor thin films; Silicon; Thermal resistance; Thermal stability; Transistors;
         
        
        
            Journal_Title : 
Nuclear Science, IEEE Transactions on
         
        
        
        
        
            DOI : 
10.1109/TNS.1970.4325820