• DocumentCode
    797403
  • Title

    Effects of Addition of Zr and Ti on Sputtered Fe-N Films

  • Author

    Terunuma, K. ; Miyazaki, M. ; Kawashima, H. ; Terazono, K.

  • Author_Institution
    TDK Co.
  • Volume
    6
  • Issue
    1
  • fYear
    1991
  • Firstpage
    23
  • Lastpage
    28
  • Abstract
    The effects of addition of Zr and Ti on iron films containing nitrogen were investigated. Film structures and magnetic properties were studied as functions of the Zr and Ti contents. The coercive force of Fe-N films increased sharply after annealing at about 350°C, while Fe-Zr-N and Fe-Ti-N films retained a small coercive force even after annealing at higher temperatures. The addition of Zr and Ti in small amounts was highly effective in improving the thermal stability of Fe-N because it prevented the growth of iron crystal grains.
  • Keywords
    Annealing; Coercive force; Iron; Magnetic films; Magnetic properties; Nitrogen; Sputtering; Temperature; Thermal stability; Zirconium;
  • fLanguage
    English
  • Journal_Title
    Magnetics in Japan, IEEE Translation Journal on
  • Publisher
    ieee
  • ISSN
    0882-4959
  • Type

    jour

  • DOI
    10.1109/TJMJ.1991.4565102
  • Filename
    4565102
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=797403