Title :
Observation of Positive Self-Bias in Radio Frequency Atmospheric Pressure Microplasmas
Author :
Qiang Chen ; Junshuai Li
Author_Institution :
Grad. Sch. of Sci. & Eng., Saitama Univ., Saitama, Japan
Abstract :
Negative self-bias is well known at the powered small-sized electrode in low-pressure capacitive-coupled discharge plasmas. In this paper, however, the self-bias at the powered electrode observed in an RF atmospheric-pressure microplasma demonstrates either a positive or negative sign depending on the supplied power and interelectrode gap.
Keywords :
electrodes; high-frequency discharges; plasma pressure; plasma sources; interelectrode gap; low-pressure capacitive-coupled discharge plasmas; negative self-bias; positive self-bias; pressure 1 atm; radio frequency atmospheric pressure microplasmas; small-sized electrode; Discharges (electric); Educational institutions; Electrodes; Nickel; Plasmas; Radio frequency; Tungsten; Atmospheric-pressure discharge microplasma (APM); positive self-bias; radio frequency;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2013.2248169