DocumentCode
79791
Title
Phase Controlled Class E Amplifier Characteristics for Pulsing Applications
Author
Eroglu, Abdullah
Author_Institution
Dept. of Eng., Purdue Univ., Fort Wayne, IN, USA
Volume
42
Issue
10
fYear
2014
fDate
Oct. 2014
Firstpage
3299
Lastpage
3308
Abstract
Phase controlled Class E amplifiers for high-power plasma pulsing applications are analyzed and their characteristics for pulsing applications are simulated and measured. Harmonic modeling is used to design the phase controlled Class E type amplifiers for plasma pulsing applications, and analytical, simulation, and experimental results are presented. The parameters that affect pulsing characteristics of the phase-controlled Class E amplifiers, including power capacity and thermal characteristics using die dissipation versus pulse frequency are given. Safe operating area of the active devices used in amplifier is simulated and tested for reliable operation. Phase controlled Class E amplifier capacity for ON/OFF pulsing, and 2-level nonzero pulsing for matched and mismatch loads for various cases have been investigated, and critical RF envelope pulsing parameters, such as rise time, fall time, settling time have been studied extensively. Analytical, simulated, and experimental results have been compared and close agreement has been seen.
Keywords
amplifiers; phase control; plasma applications; 2-level nonzero pulsing; ON-OFF pulsing; critical RF envelope pulsing parameters; die dissipation; fall time; harmonic modeling; high-power plasma pulsing applications; matched load; mismatch load; phase-controlled class-E amplifier characteristics; power capacity; pulse frequency; rise time; settling time; thermal characteristics; Harmonic analysis; Impedance; Load modeling; Logic gates; Plasmas; Radio frequency; Transistors; Class E; harmonic modeling; phase controlled; plasma; pulsing; switch-mode amplifiers; wafer processing; wafer processing.;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2014.2332552
Filename
6848786
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