Inductive Discharge Driving by Oblique Field Penetration into the Plasma

In connection with the construction of a plasma source as a matrix of small-radius discharges inductively driven by a large-area planar coil, common for the whole matrix, the type of the RF driving of the separate discharges of the matrix is studied by employing the phase-resolved optical emission spectroscopy method. The results show an inductive discharge maintenance by an oblique RF field penetration into the plasma of the discharges located outside of the central region of the coil.