Inductive Discharge Driving by Oblique Field Penetration into the Plasma

Author

Demerdzhiev, Angel P. ; Tarnev, Khisto Ts ; Lishev, Stiliyan St ; Yordanov, Dimitar Y. ; Shivarova, Antonia P.

Author_Institution

Fac. of Phys., Sofia Univ., Sofia, Bulgaria

Volume

42

Issue

10

fYear

2014

fDate

Oct. 2014

Firstpage

2390

Lastpage

2391

Abstract

In connection with the construction of a plasma source as a matrix of small-radius discharges inductively driven by a large-area planar coil, common for the whole matrix, the type of the RF driving of the separate discharges of the matrix is studied by employing the phase-resolved optical emission spectroscopy method. The results show an inductive discharge maintenance by an oblique RF field penetration into the plasma of the discharges located outside of the central region of the coil.

Keywords

high-frequency discharges; plasma diagnostics; plasma sources; RF driving; coil central region; discharge plasma; inductive discharge maintenance; large-area planar coil; matrix discharges; oblique RF field penetration; oblique field penetration; phase-resolved optical emission spectroscopy method; plasma source construction; small-radius discharges; Coils; Discharges (electric); Electron tubes; Fault location; Radio frequency; Transmission line matrix methods; Plasma diagnostics; plasma sources;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2014.2350334

Filename

6906259