DocumentCode
799208
Title
Absolute Value Measurements of Thin Film Permeability
Author
Shimada, Y. ; Numazawa, J. ; Yoneda, Y. ; Hosono, A.
Author_Institution
Tohoku University.
Volume
6
Issue
11
fYear
1991
Firstpage
987
Lastpage
993
Abstract
A method for highly precise measurement of the permeability of thin films in the VHF frequency range has been developed. The permeability of a film sample in a strong magnetic field can be predicted with very high accuracy; this permeability is then used as the standard of a measurement system. Multilayer films with various spacer thicknesses and a FeZrN micro-crystalline film were measured. Results showed that eddy current losses in the multilayer films cannot be suppressed even with insulating spacers as thick as 2000Ã…, and that the micro-crystalline film exhibits relatively high losses in the high-frequency range.
Keywords
Eddy currents; Frequency measurement; Insulation; Magnetic field measurement; Magnetic films; Magnetic multilayers; Measurement standards; Permeability measurement; Thickness measurement; Transistors;
fLanguage
English
Journal_Title
Magnetics in Japan, IEEE Translation Journal on
Publisher
ieee
ISSN
0882-4959
Type
jour
DOI
10.1109/TJMJ.1991.4565292
Filename
4565292
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