Title :
Anisotropy of Microcrystalline Co-Nb-Zr-N Films
Author :
Munakata, M. ; Shimada, H. ; Sakai, R. ; Ohtsubo, A.
Author_Institution :
Yamagata University.
Abstract :
Field-induced anisotropy in Co-Nb-Zr-N soft magnetic thin films with 9 at% nitrogen was investigated. Samples were prepared by ion beam sputtering in Ar+N2. After pre-annealing for 1 hour at 600 °C, reversible relaxation of the field-induced anisotropy was observed, with ¿Kux=700 to 1500 J/m3. The dependences of the anisotropy on annealing temperature Tra and annealing time tra were studied.
Keywords :
Anisotropic magnetoresistance; Annealing; Coercive force; Magnetic field measurement; Magnetic films; Magnetic materials; Magnetic properties; Nitrogen; Sputtering; Temperature;
Journal_Title :
Magnetics in Japan, IEEE Translation Journal on
DOI :
10.1109/TJMJ.1992.4565340
