Title :
Moving Tunable Filters Forward: A "Heterointegration" Research Project for Tunable Filters Combining MEMS and RF SAW/BAW Technologies
Author :
Hashimoto, Ken-ya ; Kimura, Tetsuya ; Matsumura, Takeshi ; Hirano, Hideki ; Kadota, Michio ; Esashi, Masayoshi ; Tanaka, Shuji
Author_Institution :
Grad. Sch. of Eng., Chiba Univ., Chiba, Japan
Abstract :
This article discusses the possibility of tunable RF surface-acoustic-wave (SAW) and bulkacoustic-wave (BAW) filters using varactors (VCs) integrated by the skillful use of micro-electromechanical system (MEMS) technologies. First, the reasons that RF tunable filters are in demand for current wireless communications are explored, and various RF tunable filters are surveyed and compared. Next comes a discussion of tunable RF SAW/BAW filters combined with MEMS technologies, showing that high performance can be expected, provided that some key technologies are developed. Finally, the article introduces tunable SAW filters, which the authors developed in a research project called "heterointegration" to demonstrate what is possible by combining MEMS technologies with RF SAW/BAW technologies.
Keywords :
bulk acoustic wave devices; micromechanical devices; radiofrequency filters; surface acoustic wave filters; varactors; MEMS technologies; RF BAW technologies; RF SAW technologies; RF tunable filters; VC; bulkacoustic-wave filters; heterointegration research project; microelectromechanical system; surface-acoustic-wave filters; tunable RF BAW filters; tunable RF SAW filters; varactors; wireless communications; Acoustic waves; MIMO; Radio frequency; Tunable filters;
Journal_Title :
Microwave Magazine, IEEE
DOI :
10.1109/MMM.2015.2431237
