Title :
Proton-exchanged wet etching of recessed-structure SAW filter
Author :
Tsai, Shih-Hung ; Wang, Na-Fh ; Houng, Mau-Phon ; Wang, Yeong-Her
Author_Institution :
Dept. of Electr. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
Abstract :
An improved method for fabricating recessed-structure surface acoustic wave (SAW) filters is reported. The relation between proton-exchanged duration and etched depth are studied, as well as the relation between internal reflection, etched depth, and thickness of the aluminum electrode. Experimental results show that the devices have superior performance, and ideas for further improvement of the fabricated SAW device are discussed.
Keywords :
aluminium; electrodes; etching; ion exchange; lithium compounds; surface acoustic wave filters; Al; Al electrode thickness; LiNbO/sub 3/; etched depth; internal reflection; proton-exchanged duration; proton-exchanged wet etching; recessed-structure SAW filter; surface acoustic wave filter fabrication; Chromium; Dry etching; Fabrication; Protons; SAW filters; Sputter etching; Substrates; Surface acoustic wave devices; Surface acoustic waves; Wet etching;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2003.1235335
