DocumentCode
800026
Title
Deposition Rate and Surface Smoothness of Fe3 O4 Films Prepared by Light-Enhanced Ferrite Plating
Author
Hori, S. ; Itoh, T. ; Abe, M. ; Tamaura, Y.
Author_Institution
Tokyo Institute of Technology.
Volume
7
Issue
4
fYear
1992
fDate
4/1/1992 12:00:00 AM
Firstpage
290
Lastpage
294
Abstract
Polycrystalline Fe3 O4 films were deposited by ferrite plating, irradiating the substrate surface with a Xe-lamp (350 W) and using FeCl2 and NaNO2 as the reaction and oxidizing solutions, respectively. When the concentration of FeCl2 was high, the film surface was rough, with particle of 0.2~0.4 ¿m in size. As the concentration of FeCl2 decreased the film surface smoothness improved, but the film deposition rate decreased. Addition of dextran ((C6 H10 O5 )n , n= 1200~1800) to the reaction solution improved the film surface smoothness without significantly lowering the deposition rate.
Keywords
Fabrication; Ferrite films; Indium tin oxide; Iron; Magnetic films; Magnetic materials; Magnetics Society; Rough surfaces; Substrates; Surface roughness;
fLanguage
English
Journal_Title
Magnetics in Japan, IEEE Translation Journal on
Publisher
ieee
ISSN
0882-4959
Type
jour
DOI
10.1109/TJMJ.1992.4565381
Filename
4565381
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