Title :
A small OCA on a 1×0.5-mm2 2.45-GHz RFID Tag-design and integration based on a CMOS-compatible manufacturing technology
Author :
Guo, L.H. ; Popov, A.P. ; Li, H.Y. ; Wang, Y.H. ; Bliznetsov, V. ; Lo, G.Q. ; Balasubramanian, N. ; Kwong, D.-L.
Author_Institution :
Inst. of Microelectron., Singapore, Singapore
Abstract :
This letter reports, for the first time, on the design strategy and process integration for a small on-chip-antenna (OCA) with a radio-frequency identification (RFID) tag chip-area ∼1×0.5 mm2. It is designed based on a 2.45-GHz RFID tag circuit with an inductive-coupling model. A patterned Al shielding layer is used to improve the consistency of the actual performance obtained from fabricated devices and those predicated from the design. The antenna´s inductor coils were fabricated based on a conventional Cu-Damascene process. To achieve the required antenna performance (e.g., Q-factor), a set of thick USG and deep-via etch processes were specifically developed. Our results demonstrate that the dc power converted by the OCA is sufficient to enable the RFID tag chip to communicate with a corresponding 2.45-GHz RFID reader with a 1-mm distance.
Keywords :
CMOS integrated circuits; antennas; coils; integrated circuit design; radiofrequency identification; 1 mm; 2.45 GHz; Al; CMOS; USG; deep-via etch processes; design strategy; inductive-coupling model; inductor coils; manufacturing technology; on-chip-antenna; process integration; radio-frequency identification tag; Backscatter; CMOS technology; Design optimization; Fabrication; Manufacturing; Power conversion; Process design; RFID tags; Radio frequency; Radiofrequency identification; CMOS-compatible process and integration; design; inductive-coupling model; on-chip antenna (OCA); radio-frequency identification (RFID);
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2005.862682
