Title :
Micro-machined three-dimensional micro-optics for integrated free-space optical system
Author :
Lin, L.Y. ; Lee, S.S. ; Pister, K.S.J. ; Wu, M.C.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
Novel, integrable three-dimensional micro-optical elements have been realized by surface micromachining technology. Rotatable mirrors, lenses and beam-splitters standing perpendicular to the substrate are demonstrated. The optical elements are precisely held at 90/spl deg/ angle to the substrate by side latches. The Si substrate serves as a "micro-optical bench" on which monolithic micro-optical systems consisting of movable and static micro-mirrors, lenses and other components are constructed. The optical system is pre-aligned by photolithography. This technology offers a new approach to free-space integrated optics and low-cost optical packaging.<>
Keywords :
integrated optics; lenses; micromachining; mirrors; optical elements; optical fabrication; photolithography; Si substrate; beam-splitters; free-space integrated optics; integrable three-dimensional micro-optical elements; integrated free-space optical system; lenses; low-cost optical packaging; micro-machined three-dimensional micro-optics; micro-mirrors; micro-optical bench; monolithic micro-optical systems; photolithography; rotatable mirrors; side latches; substrate; surface micromachining technology; Fresnel reflection; Integrated optics; Lenses; Lithography; Micromachining; Mirrors; Optical arrays; Optical interconnections; Space technology; Springs;
Journal_Title :
Photonics Technology Letters, IEEE
