Micro-machined three-dimensional micro-optics for integrated free-space optical system

Author

Lin, L.Y. ; Lee, S.S. ; Pister, K.S.J. ; Wu, M.C.

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA

Volume

6

Issue

12

fYear

1994

Firstpage

1445

Lastpage

1447

Abstract

Novel, integrable three-dimensional micro-optical elements have been realized by surface micromachining technology. Rotatable mirrors, lenses and beam-splitters standing perpendicular to the substrate are demonstrated. The optical elements are precisely held at 90/spl deg/ angle to the substrate by side latches. The Si substrate serves as a "micro-optical bench" on which monolithic micro-optical systems consisting of movable and static micro-mirrors, lenses and other components are constructed. The optical system is pre-aligned by photolithography. This technology offers a new approach to free-space integrated optics and low-cost optical packaging.<>

Keywords

integrated optics; lenses; micromachining; mirrors; optical elements; optical fabrication; photolithography; Si substrate; beam-splitters; free-space integrated optics; integrable three-dimensional micro-optical elements; integrated free-space optical system; lenses; low-cost optical packaging; micro-machined three-dimensional micro-optics; micro-mirrors; micro-optical bench; monolithic micro-optical systems; photolithography; rotatable mirrors; side latches; substrate; surface micromachining technology; Fresnel reflection; Integrated optics; Lenses; Lithography; Micromachining; Mirrors; Optical arrays; Optical interconnections; Space technology; Springs;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.392216

Filename

392216