Title :
Pulse electrodeposition of 2.4 T Co37Fe63 alloys at nanoscale for magnetic recording application
Author :
Brankovic, Stanko R. ; Yang, XiaoMin ; Klemmer, Timothy J. ; Seigler, Mike
Author_Institution :
Dept. of Electr. & Comput. Eng., Houston Univ., TX, USA
Abstract :
Pulse deposition of 2.4 T Co37Fe63 alloy in photoresist features with 40 nm critical dimension and high aspect ratio is presented. The design of the pulse deposition parameters is described in terms of the transport limitations through the diffusion layer, electrochemical interface stability with respect to Fe(OH)3 precipitation, and the optimum conditions for additive (Saccharin) adsorption. The alloy grain size and crystal structure in the nanoconfined electrode geometry is compared versus the thin film and relevant implications for magnetic recording are discussed. The 2.4 T Co38Fe61Pd1 alloy is introduced as a possible way to improve the corrosion properties of 2.4 T Co37Fe63 alloy.
Keywords :
additives; adsorption; cobalt alloys; corrosion; electrodeposition; grain size; magnetic recording; photoresists; 2.4 T; Co37Fe63; Saccharin; additive adsorption; alloy grain size; aspect ratio; corrosion properties; critical dimension; crystal structure; diffusion layer; electrochemical interface; magnetic recording; nanoconfined electrode geometry; photoresist; precipitation; pulse electrodeposition; thin film; Cobalt alloys; Electrodes; Geometry; Grain size; Iron alloys; Magnetic films; Magnetic recording; Nanostructures; Resists; Stability; Co–Fe alloys; Saccharin; corrosion; electrodeposition; pulse deposition;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2005.861778
