DocumentCode :
801498
Title :
Effects of N Addition on the soft Magnetic Properties of Fe-Hf-O Thin Films
Author :
Kojima, A. ; Makino, A.
Author_Institution :
Alps Electric Co., Ltd.
Volume :
7
Issue :
11
fYear :
1992
Firstpage :
891
Lastpage :
895
Abstract :
Tht effects of N addition on the magnetic properties and structure of Fe-Hf-O sputtered films were investigated. The addition of N to Fe88-93Hf2-3O5-9 thin films was found to decrease the coercivity, Hc, both in the as-deposited state and after annealing at 773K to 873K, owing to the smaller ¿-Fe (bcc phase) crystal grains. In particular, Fe85.1Hf2.1O5.5N7.3 films composed of the bcc phase with fine (150 Å) grains, ¿-Fe4N and hafnium oxide nitride, exhibited a low coercivity of 64 A/m and a high saturation magnetization, Bs, of about 1.7 T even after annealing at 873K. With its high Bs, low Hc and good thermal stability, such film is expected to prove useful as a magnetic head material.
Keywords :
Annealing; Coercive force; Hafnium oxide; Iron; Magnetic films; Magnetic materials; Magnetic properties; Saturation magnetization; Sputtering; Thermal stability;
fLanguage :
English
Journal_Title :
Magnetics in Japan, IEEE Translation Journal on
Publisher :
ieee
ISSN :
0882-4959
Type :
jour
DOI :
10.1109/TJMJ.1992.4565525
Filename :
4565525
Link To Document :
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