Title :
Thermal Stability of Fe-Zr/Fe-Zr-N Soft Magnetic Multilayered Films
Author :
Ono, H. ; Fujinaga, M. ; Yonemoto, T. ; Miyagawa, T.
Author_Institution :
RIMES Ltd.
Abstract :
stract-Fe-Zr/Fe-Zr-N multilayered films were prepared by alternation of Fe-Zr sputtering and electron cyclotron resonance (ECR) plasma nitridation. Thermal stability of the films´ soft magnetic properties was investigated. A saturation flux density of Bs=1.8 T, coercivity Hc=88 A/m and relative permeability ¿´≫3000 (at 20 MHz) were obtained for Fe92Zr8/Fe92Zr8-N multilayered film after annealing at 773K for 3600 s. Addition of Zr to Fe/Fe-N multilayered films effectively improves the thermal stability of soft magnetic properties.
Keywords :
Iron; Magnetic films; Magnetic flux; Magnetic properties; Magnetic resonance; Plasma stability; Saturation magnetization; Soft magnetic materials; Thermal stability; Zirconium;
Journal_Title :
Magnetics in Japan, IEEE Translation Journal on
DOI :
10.1109/TJMJ.1992.4565528
