DocumentCode :
802252
Title :
A fab life
Volume :
46
Issue :
5
fYear :
2009
fDate :
5/1/2009 12:00:00 AM
Firstpage :
20
Lastpage :
21
Abstract :
Presents a photograph of a clean-room technician holding a polymer film disc that´s been embossed with dozens of microchips using Jenoptik´s microscale thermoforming process.
Keywords :
Laboratories; Microelectrodes; Microscopy; Polymer films; Thermoforming;
fLanguage :
English
Journal_Title :
Spectrum, IEEE
Publisher :
ieee
ISSN :
0018-9235
Type :
jour
DOI :
10.1109/MSPEC.2009.4907377
Filename :
4907377
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=802252
