DocumentCode
802508
Title
104 GHz signals measured by high frequency scanning force microscope test system
Author
Leyk, A. ; Böhm, C. ; van der Weide, D.W. ; Kubalec, E.
Author_Institution
Gerhard-Mercato-Univ., Duisburg, Germany
Volume
31
Issue
13
fYear
1995
fDate
6/22/1995 12:00:00 AM
Firstpage
1046
Lastpage
1047
Abstract
A newly-developed high frequency scanning force microscope (HFSFM) test system combines both high spatial and temporal resolution. And enables functional probing and failure analysis of monolithic microwave integrated circuits (MMICs). The upper frequency limit of this test system. Originally 20 GHz, was extended to >100 GHz using nonlinear transmission lines. With all components packaged in a simple arrangement using 3.5 mm microwave coaxial connectors. Even with this severe limitation. On-chip measurement of 104 GHz signals were performed
Keywords
MMIC; failure analysis; force measurement; integrated circuit testing; scanning probe microscopy; 104 GHz; 3.5 mm; failure analysis; functional probing; high frequency scanning force microscope; microwave coaxial connectors; monolithic microwave integrated circuits; nonlinear transmission lines; on-chip measurement; packaged; spatial resolution; temporal resolution; test system; upper frequency limit;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19950715
Filename
392671
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