Title :
104 GHz signals measured by high frequency scanning force microscope test system
Author :
Leyk, A. ; Böhm, C. ; van der Weide, D.W. ; Kubalec, E.
Author_Institution :
Gerhard-Mercato-Univ., Duisburg, Germany
fDate :
6/22/1995 12:00:00 AM
Abstract :
A newly-developed high frequency scanning force microscope (HFSFM) test system combines both high spatial and temporal resolution. And enables functional probing and failure analysis of monolithic microwave integrated circuits (MMICs). The upper frequency limit of this test system. Originally 20 GHz, was extended to >100 GHz using nonlinear transmission lines. With all components packaged in a simple arrangement using 3.5 mm microwave coaxial connectors. Even with this severe limitation. On-chip measurement of 104 GHz signals were performed
Keywords :
MMIC; failure analysis; force measurement; integrated circuit testing; scanning probe microscopy; 104 GHz; 3.5 mm; failure analysis; functional probing; high frequency scanning force microscope; microwave coaxial connectors; monolithic microwave integrated circuits; nonlinear transmission lines; on-chip measurement; packaged; spatial resolution; temporal resolution; test system; upper frequency limit;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19950715
