Title :
Accelerated IC test procedure for measuring capacitor ratios using DC extraction techniques
Author :
Manku, T. ; Swart, N.R.
Author_Institution :
Dept. of Electr. Eng., Tech. Univ. Nova Scotia, Halifax, NS, Canada
fDate :
6/22/1995 12:00:00 AM
Abstract :
A technique and associated test structure for measuring IC capacitor ratios are presented. The technique measures these ratios within a time frame of <100 ms. The procedure uses capacitive coupling between the two test capacitors and an MOS transistor. The measurement errors associated with this method are discussed and quantified
Keywords :
capacitance measurement; capacitors; integrated circuit testing; life testing; measurement errors; 100 ms; DC extraction techniques; MOS transistor; accelerated IC test procedure; capacitive coupling; capacitor ratios; measurement errors; test capacitors; test structure; time frame;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19950699
