Author :
Mimura, T. ; Ohmoto, S. ; Nawate, M. ; Honda, S.
Abstract :
Co/Cu multilayer films were prepared by rf sputtering, both with and with-out a substrate bias voltage VB=¿30 V. X-ray diffraction results indicated that the layer boundaries in ¿30 V biased films are sharper, and the orientation of (111) planes are better, than in films prepared without a bias voltage. In films with zero bias, the MR ratio increases monotonically with the Cu layer thickness dCu up to about 40 Ã
, and then decreases. On the other hand, in films prepared with a ¿30 V bias the MR ratio oscillates with dCu, and peaks appeared at dCu= 23, 36 and 48Ã
. The maximum MR ratio was obtained for the structure [Co(15.1 Ã
)/Cu(24.3 Ã
)]30/Cu(50 Ã
), with a value of 13.1% at room temperature and 17.0% at 110K. In this film, the interlayer coupling strength J was very small, 0.008 erg/cm2. The sharpness of the MR change, ¿R/R(Hs)·¿H, was a very large 2.2 kOe¿1 The different dCu dependences of films prepared with a ¿30 V bias and with zero bias is thought to originate in the different qualities of the layer boundaries. The extraordinary Hall effect and the planar Hall effect are discussed.