DocumentCode :
803189
Title :
Scaling characteristics of the XeF (CA) excimer laser
Author :
Dane, Brent C. ; Hirst, Graeme J. ; Yamaguchi, Shigeru ; Hofmann, Thomas ; Wilson, William L., Jr. ; Sauerbrey, Roland ; Tittel, Frank K. ; Nighan, William L. ; Fowler, Michael C.
Author_Institution :
Dept. of Electr. & Comput. Eng., Rice Univ., Houston, TX, USA
Volume :
26
Issue :
9
fYear :
1990
fDate :
9/1/1990 12:00:00 AM
Firstpage :
1559
Lastpage :
1568
Abstract :
The scaling characteristics and medium properties of an injection-controlled XeF(CA) laser pumped by a 10-ns-high current density electron beam have been investigated. A five-component laser gas mixture, consisting of F2, NF3 , Xe, Kr, and Ar was optimized for the scaled laser conditions, resulting in 0.8-J output pulses at 486.8 nm, corresponding to an energy density of small-signal-gain measurements combined with kinetic modeling permitted the characteristics of the dependence of net gain on the electron-beam energy deposition and gas mixture composition, resulting in an improved understanding of XeF(CA) laser operation
Keywords :
excimer lasers; laser transitions; xenon compounds; (C→A) excimer laser; 0.8 J; 1.3 percent; 10 ns; 486.8 nm; F2-NF3-Xe-Kr-Ar; XeF laser; electron-beam energy deposition; energy density; five-component laser gas mixture; gas mixture composition; high current density electron beam; injection controlled lasers; kinetic modeling; net gain; scaling characteristics; small-signal-gain measurements; Argon; Current density; Electron beams; Gas lasers; Laser excitation; Laser modes; Noise measurement; Pulse measurements; Pulsed laser deposition; Pump lasers;
fLanguage :
English
Journal_Title :
Quantum Electronics, IEEE Journal of
Publisher :
ieee
ISSN :
0018-9197
Type :
jour
DOI :
10.1109/3.102636
Filename :
102636
Link To Document :
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