DocumentCode
80410
Title
Fabrication and characterisation of high sensitivity copper-copper oxide-copper (Cu-CuO-Cu) metal-insulator-metal tunnel junctions
Author
Abdel-Rahman, Mohamed ; Syaryadhi, M. ; Debbar, Nacer
Author_Institution
Prince Sultan Adv. Technol. Res. Inst. (PSATRI), King Saud Univ., Riyadh, Saudi Arabia
Volume
49
Issue
5
fYear
2013
fDate
February 28 2013
Firstpage
363
Lastpage
364
Abstract
A report is presented on the realisation and characterisation of symmetrical metal-insulator-metal (MIM) diodes using the new material combination: copper-copper oxide-copper (Cu-CuO-Cu). The MIM diodes, having contact areas of 2 × 2 ×m2, were fabricated using electron beam lithography and sputter deposition. The MIM diodes exhibited an absolute sensitivity as high as 4.497 V- 1.
Keywords
MIM structures; electron beam lithography; sputter deposition; Cu-CuO-Cu; electron beam lithography; high sensitivity copper-copper oxide-copper; metal-insulator-metal tunnel junctions; size 2 mum; sputter deposition; symmetrical metal-insulator-metal diodes;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el.2012.4222
Filename
6473960
Link To Document