Structure and Tribological Characteristics of DC-Magnetron Sputtered DLC Overlayer Films

We investigated the structure xand tribological properties of diamond-like carbon (DLC) overcoat films for rigid magnetic disks. DLC films were produced by DC magnetron sputtering, introducing CH4 gas into Ar gas in various quantities. Drag tests and CSS tests were performed, and the electrical resistivity, Raman spectra and film hydrogen contents were measured. A more polymer-like DLC film appeared to have good tribological properties, making it suitable as a hard-head slider material (Al2O3-TiC).