Title :
Monolithic Wilkinson power divider on CMOS grade silicon with a polyimide interface layer for antenna distribution networks
Author :
Ponchak, G.E. ; Bacon, A. ; Papapolymerou, J.
Author_Institution :
NASA Glenn Res. Center, Cleveland, OH, USA
fDate :
6/25/1905 12:00:00 AM
Abstract :
Using an optimized finite ground coplanar waveguide layout on a CMOS grade silicon wafer with a 20 μm thick polyimide interface layer and embedded passives, a Wilkinson power divider is built. The measured characteristics show an insertion loss of only 0.57 dB at 12.5 GHz and better than 15 dB return loss and isolation.
Keywords :
MMIC; antenna feeds; coplanar waveguide components; power dividers; silicon; substrates; 0.57 dB; 12.5 GHz; 20 micron; CMOS grade silicon; Si; Wilkinson power divider; antenna distribution networks; coplanar waveguide; embedded passives; insertion loss; isolation; monolithic power divider; polyimide interface layer; return loss; Circuits; Coplanar waveguides; Dielectric loss measurement; Dielectric substrates; Insertion loss; Loss measurement; Polyimides; Power dividers; Power transmission lines; Silicon;
Journal_Title :
Antennas and Wireless Propagation Letters, IEEE
DOI :
10.1109/LAWP.2003.819043