Title :
A Second-Order Delta-Sigma Control of Dielectric Charge for Contactless Capacitive MEMS
Author :
Gorreta, Sergi ; Pons-Nin, Joan ; Blokhina, Elena ; Dominguez, Manuel
Author_Institution :
Dept. of Electron. Eng., Univ. Politec. de Catalunya, Barcelona, Spain
Abstract :
This letter introduces a new second-order delta-sigma method for controlling the dielectric charge in contactless capacitive microelectromechanical systems. This method improves the one previously proposed by the authors, providing second-order quantization noise shaping and avoiding the plateaus typical of first-order strategies. The feasibility and the features of the new method are demonstrated both experimentally and through simulations.
Keywords :
delta-sigma modulation; micromechanical devices; reliability; contactless capacitive MEMS; dielectric charge; microelectromechanical systems; second-order delta-sigma control; second-order quantization noise shaping; Capacitance; Dielectrics; Fractals; Microelectromechanical systems; Micromechanical devices; Modulation; Sensors; Dielectric charging control; MEMS reliability; MEMS reliability.;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2015.2402394
