Title :
Determining the Energy Distribution of Pulse-Radiation-Induced Charge in MOS Structures from Rapid Annealing Measurements
Author :
Simons, M. ; Hughes, H.L.
Author_Institution :
Research Triangle Institute Research Triangle Park, N. C.
Abstract :
Activation energy distributions for the positive space charge induced in MOS structures by pulsed ionizing radiation have been calculated from shortterm, isothermal annealing data. These distributions are compared for conventional thermal oxides and oxides implanted with aluminum or sodium ions.
Keywords :
Aluminum; Annealing; Capacitance-voltage characteristics; Charge measurement; Current measurement; Energy measurement; Ion beams; Laboratories; Measurement techniques; Pulse measurements;
Journal_Title :
Nuclear Science, IEEE Transactions on
DOI :
10.1109/TNS.1972.4326846
