Title :
CVM--A Microprocessor-Based Intelligent Instrument
Author_Institution :
Solid-State Technology Center, RCA Laboratories, Somerville, NJ 08876.
fDate :
5/1/1978 12:00:00 AM
Abstract :
This paper describes an intelligent instrument for monitoring physical characteristics of MOS wafers. The microprocessor-based CVM provides on-the-spot capacitance-voltage analysis during manufacturing. It then sends the accumulated data to a remote mainframe as a time-sharing user, so that an archival database can be maintained and long-term trend analysis can be made.
Keywords :
Capacitance; Capacitance-voltage characteristics; Computerized monitoring; Instruments; Manufacturing processes; Remote monitoring; Solid state circuits; Statistical analysis; Time sharing computer systems; Voltage;
Journal_Title :
Industrial Electronics and Control Instrumentation, IEEE Transactions on
DOI :
10.1109/TIECI.1978.351521
