DocumentCode
808195
Title
Low dark current, long wavelength metal-semiconductor-metal photodetectors
Author
Wohlmuth, W.A. ; Fay, P. ; Caneau, C. ; Adesida, I.
Author_Institution
Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA
Volume
32
Issue
3
fYear
1996
fDate
2/1/1996 12:00:00 AM
Firstpage
249
Lastpage
250
Abstract
Dark current densities of 0.13 and 0.44 pA/μm2 at biases of 5 and 10 V, respectively, have been obtained for InAlAs/InGaAs metal-semiconductor-metal photodetectors with a 2 μm electrode width and spacing, by placing the electrode tips and contact pads on top of an insulating layer of silicon nitride. This is the lowest known dark current density reported for InAlAs/InGaAs metal-semiconductor-metal photodetectors to date
Keywords
III-V semiconductors; aluminium compounds; gallium arsenide; indium compounds; metal-semiconductor-metal structures; photodetectors; InAlAs-InGaAs; Si3N4; dark current densities; insulating layer; long wavelength metal-semiconductor-metal photodetectors;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19960178
Filename
490832
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