A vertically integrated micromachined filter

Author

Harle, Lee ; Katehi, Linda P B

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA

Volume

50

Issue

9

fYear

2002

fDate

9/1/2002 12:00:00 AM

Firstpage

2063

Lastpage

2068

Abstract

A 10-GHz filter constructed of slot-coupled micromachined cavities in silicon is presented. The novel character of the filter lies in its structure, which consists of a microstrip feed to cavities via slot apertures and three vertically stacked slot-coupled cavities. The cavities are essentially reduced-height waveguide resonators. The measured results are presented and compared to a finite-element-method model. The simulated model has a bandwidth of 4% with an insertion loss of 0.9 dB at 10.02 GHz. The measured filter yields a 3.7% bandwidth with a deembedded insertion loss of 2.0 dB at 10.01 GHz. Various loss mechanisms are examined to explain the difference between simulated and measured insertion loss

Keywords

cavity resonator filters; finite element analysis; losses; micromachining; microwave filters; waveguide filters; 0.9 dB; 10 GHz; 2.0 dB; Si; deembedded insertion loss; finite-element-method model; insertion loss; loss mechanisms; microstrip feed; reduced-height waveguide resonators; slot apertures; slot-coupled micromachined cavities; vertically stacked slot-coupled cavities; Bandwidth; Dielectric losses; Dielectric substrates; Insertion loss; Laboratories; Micromachining; Microwave filters; Planar transmission lines; Propagation losses; Resonator filters;

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/TMTT.2002.802317

Filename

1028942