Title :
Compact multilayer filter structures for coplanar MMICs
Author :
Menzel, Wolfgang ; Schumacher, Hermann ; Schwab, Wolfgang ; Zhang, Xiangkun
Author_Institution :
Ulm Univ., Germany
Abstract :
Coplanar filter structures busing two metallization layers separated by a polyimide film on GaAs were investigated. This arrangement provides additional degrees of freedom compared to the standard coplanar line, resulting in extremely compact filters suitable for monolithic integration.<>
Keywords :
MMIC; microwave filters; passive filters; polymer films; GaAs; coplanar MMICs; metallization layers; monolithic integration; multilayer filter structures; polyimide film; Active filters; Dielectric films; Dielectric losses; Gallium arsenide; MMICs; Metallization; Nonhomogeneous media; Polyimides; Resists; Substrates;
Journal_Title :
Microwave and Guided Wave Letters, IEEE
