Photonic Crystal-Based MOEMS Devices

Author

Boutami, Salim ; Bakir, Badhise Ben ; Leclercq, Jean-Louis ; Letartre, Xavier ; Seassal, Christian ; Rojo-Romeo, Pedro ; Regreny, Philippe ; Garrigues, Michel ; Viktorovitch, Pierre

Author_Institution

Ecole Centrale de Lyon, Ecully

Volume

13

Issue

2

fYear

2007

Firstpage

244

Lastpage

252

Abstract

In this paper, a new class of microoptoelectromechanical system (MOEMS) devices combining photonic crystals (PCs) formed in in-plane waveguiding membranes (in-plane 1-D or 2-D large contrast modulation of the optical index) and a multilayer stack (1-D "vertical" modulation of the optical index) according to the so-called 2.5-D micronanophotonics approach is reported. The operation of the devices is based on the resonant coupling between radiated optical modes and slow Bloch modes waveguided in the particular membranes of the stack, which are laterally patterned to form a PC. Use of high-index contrast PC gratings result in enhanced lateral compactness of the devices. The MOEMS functionality is achieved via micromechanical subwavelength vertical displacement of some of the suspended membranes. Recent demonstrations of devices (including tunable filters and surface-emitting microsources) operating along these principles are presented

Keywords

diffraction gratings; integrated optics; micro-optomechanical devices; nanotechnology; optical multilayers; optical waveguides; photonic crystals; MOEMS devices; high-index contrast gratings; in-plane waveguiding membranes; lateral patterning; micromechanical displacement; micronanophotonics; microoptoelectromechanical systems; multilayer stack; optical waveguides; photonic crystal; photonic crystal gratings; radiated optical modes; resonant coupling; slow Bloch modes; stack membranes; subwavelength vertical displacement; surface-emitting microstructures; suspended membranes; tunable filters; Biomembranes; Nonhomogeneous media; Optical coupling; Optical devices; Optical filters; Optical modulation; Optical waveguides; Personal communication networks; Photonic crystals; Resonance; Filters; indium phosphide; membrane; microoptoelectromechanical system (MOEMS); photonic crystals (PCs); surface-emitting lasers;

fLanguage

English

Journal_Title

Selected Topics in Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

1077-260X

Type

jour

DOI

10.1109/JSTQE.2007.893079

Filename

4159962