Title :
A Micromirror With Large Static Rotation and Vertical Actuation
Author :
Chiou, Jin-Chern ; Kou, Chin-Fu ; Lin, Yung-Jiun
Author_Institution :
Dept. of Electr. & Control Eng., Nat. Chiao Tung Univ., Hsinchu
Abstract :
A micromirror with large rotation angle and vertical displacement is proposed and developed. The proposed micromirror is actuated by newly developed prestress comb drive actuators, which exhibit no pull-in, no hysteresis, and large vertical displacement range characteristics. The micromirror was fabricated using commercially available PolyMUMPs. Experimental results indicated that the maximum rotation angle and vertical displacement of the device are 26 and 45 mum, respectively
Keywords :
microactuators; micromirrors; optical design techniques; optical fabrication; microelectromechanical systems; micromirror; polyMUMP; prestress comb drive actuator; rotation angle; vertical actuation; vertical displacement; Drives; Electrodes; Electrostatic actuators; Fabrication; Hysteresis; Micromechanical devices; Micromirrors; Optical attenuators; Optical switches; Principal component analysis; Microelectromechanical systems (MEMS); micromirror; microoptoelectromechanical systems (MOEMS); prestress comb drive actuator (PCA);
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/JSTQE.2007.892069
