A Bio–Fluidic–Photonic Platform Based on Deep UV Modification of Polymers

Author

Rabus, Dominik G. ; Bruendel, Mathias ; Ichihashi, Yasuhisa ; Welle, Alexander ; Seger, R. Adam ; Isaacson, Michael

Author_Institution

California Univ., Santa Cruz, CA

Volume

13

Issue

2

fYear

2007

Firstpage

214

Lastpage

222

Abstract

We present a review of our work on deep UV (DUV) modification of methacrylate-based polymers. This technology serves as a platform for realizing planar and ridge waveguide-based devices, fluidic channels, and enables the patterning of living cells including neural cells in vitro. Details on the DUV chemistry and fabrication technologies including hot embossing of multimode interference couplers will be given

Keywords

biological techniques; cellular biophysics; embossing; microfluidics; nanobiotechnology; optical couplers; optical fabrication; optical planar waveguides; optical polymers; photochemistry; ridge waveguides; biofluidic-photonic platform; deep ultraviolet chemistry; deep ultraviolet modification; fluidic channels; hot embossing; integrated microsystems; integrated nanosystems; living cell patterning; methacrylate-based polymers; multimode interference couplers; neural cells; planar waveguide; ridge waveguide; Biomedical optical imaging; Embossing; Integrated circuit technology; Optical device fabrication; Optical devices; Optical polymers; Optical refraction; Optical sensors; Optical variables control; Optical waveguides; Deep UV (DUV); photonic integrated circuits; polymer;

fLanguage

English

Journal_Title

Selected Topics in Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

1077-260X

Type

jour

DOI

10.1109/JSTQE.2007.892073

Filename

4159994