Title :
De-embedding coplanar probes with planar distributed standards
Author :
Williams, Dylan F. ; Miers, Tom H.
Author_Institution :
Ball Aerosp. Syst. Div., Boulder, CO, USA
Abstract :
Two methods to de-embed coplanar probes using offset coplanar waveguide shorts and transmission lines are described. The accuracy of the de-embedded measurements is verified. The S-parameters of lumped standards provided by the manufacturer of the probes are measured and found to be suitable for purposes of calibration up to 26 GHz.<>
Keywords :
S-parameters; calibration; integrated circuit testing; measurement standards; microwave measurement; probes; semiconductor device testing; 26 GHz; CPW; MMICs; S-parameters; SHF; calibration; coplanar probes; de-embedded measurements; deembedding; lumped standards; microwave device testing; microwave transistors; offset coplanar waveguide shorts; planar distributed standards; transmission lines; Calibration; Coplanar waveguides; Impedance measurement; Integrated circuit measurements; Manufacturing; Microwave transistors; Monolithic integrated circuits; Probes; Scattering parameters; Transmission line measurements;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
