DocumentCode :
810805
Title :
124 
Rotation Angle Electrothermal Micromirror With Integrated Platinum Heater
Author :
Wu, Lei ; Xie, Huikai
Author_Institution :
Florida Univ., Gainesville, FL
Volume :
13
Issue :
2
fYear :
2007
Firstpage :
316
Lastpage :
321
Abstract :
We report a single-crystal silicon (SCS)-based micromirror that is electrothermally actuated by a platinum heater integrated at the end of a thermal bimorph actuator. The mirror size is 1 mm times1 mm. A large rotation angle of 124 deg has been obtained at a dc voltage of 12.5 V. The resonant frequency of the device is 336 Hz. The radius of curvature of the mirror plate is 130 mm. A lumped circuit model has been developed for electrothermomechanical behavioral simulation and design optimization. The simulation results by the circuit model match the experimental data to within 6.9%
Keywords :
electric actuators; elemental semiconductors; micromirrors; optical design techniques; optical scanners; platinum; silicon; 12.5 V; 130 mm; 336 Hz; electrothermal micromirror; lumped circuit model; platinum heater; single-crystal silicon; thermal bimorph actuator; Actuators; Circuit simulation; Design optimization; Electrothermal effects; Micromirrors; Mirrors; Platinum; Resonant frequency; Silicon; Voltage; Electrothermal actuation; micromirror; optical scanners;
fLanguage :
English
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
Publisher :
ieee
ISSN :
1077-260X
Type :
jour
DOI :
10.1109/JSTQE.2007.894066
Filename :
4160001
Link To Document :
