DocumentCode
811331
Title
Current mismatch due to local dopant fluctuations in MOSFET channel
Author
Yang, Hongning ; Macary, Véronique ; Huber, John L. ; Min, Won-Gi ; Baird, Bob ; Zuo, Jiangkai
Author_Institution
SmartMos Technol. Center, Motorola Inc., Tempe, AZ, USA
Volume
50
Issue
11
fYear
2003
Firstpage
2248
Lastpage
2254
Abstract
A microscopic multitransistor model is developed to analyze the impact of local dopant fluctuation on the intrinsic mismatch of long-channel MOSFET. A closed analytical formula for current mismatch is derived to show a nonscaled and self-consistent form ∼[4+Log(L/Lmin)]/WL. This is in contrast to the global fluctuation model, in which the current mismatch has a universal scaling form ∼1/WL but is not self-consistent if a MOSFET is modeled as an equivalent two-transistor system. The weak violation of scaling law results from the local fluctuation that has more impact on longer channel devices than on shorter ones. Our new model is consistent with recent experimental observation and can explain the discrepancies between the experimental data and the existing models. The analysis indicates that the local dopant fluctuation is the major cause and accounts for about 60% to 80% of total current mismatch when operated at lower gate voltage, a usual regime for higher output impedance.
Keywords
MOSFET; doping profiles; fluctuations; semiconductor device models; closed analytical formula; current mismatch; intrinsic mismatch; local dopant fluctuation; long-channel MOSFET; low gate voltage operation; microscopic multitransistor model; nonscaled self-consistent form; output impedance; weak scaling law violation; Fluctuations; Impedance; MOSFET circuits; Microscopy; Semiconductor device doping; Semiconductor device modeling; Semiconductor process modeling; Solid modeling; Stochastic processes; Voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/TED.2003.818282
Filename
1239048
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