Title :
Fabrication process for thick-film micromachined multi-pole electromagnets
Author :
Harrison, Jonathan ; Paydar, Omeed ; Yongha Hwang ; Wu, Junyong ; Threlkeld, Evan ; Musumeci, P. ; Candler, R.N.
Author_Institution :
Dept. of Electr. Eng., Univ. of California at Los Angeles, Los Angeles, CA, USA
Abstract :
This letter introduces a fabrication process for thick (>50 μm) multipole electromagnets that produce fields exceeding 20 mT across 0.2-mm3 free-space volumes. The novelty of the process involves the multistep thick-film electroplating of a magnetic alloy inside a high-density high-aspect-ratio solenoidal coil, producing high intensity fields across a larger volume than previous microelectromechanical systems electromagnets. To demonstrate an application enabled by this process, a 600-μm-gap four-pole electromagnet is fabricated, packaged, and used to steer a 34-keV electron beam.
Keywords :
coils; electromagnets; electron beams; electroplating; micromachining; micromechanical devices; packaging; distance 600 mum; electron beam; electron volt energy 34 keV; electroplating; highdensity high-aspect-ratio solenoidal coil; magnetic alloy; microelectromechanical systems electromagnets; thick-film micromachined multipole electromagnets; Electromagnets; Fabrication; Magnetomechanical effects; Micromechanical devices; Resists; Saturation magnetization; Windings; Magnetic devices; electromagnets; micromachining; particle beam steering; particle focusing; particle focusing.; thick film devices;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2014.2315763
