Title :
Critical analysis of matching schemes in capacitively coupled discharges
Author_Institution :
Phys. Dept., Middle East Tech. Univ., Ankara, Turkey
Abstract :
It is shown that, in capacitively coupled radio frequency discharges, the amplitude of the discharge current may not have a unique value for a matching network designed to yield the maximum power transfer. The condition, which may lead to this uncertainty, is derived to avoid the possible, undesired mode of operation.
Keywords :
high-frequency discharges; plasma sheaths; capacitive coupling; capacitively coupled discharges; capacitively coupled radio frequency discharges; critical analysis; discharge current; gas discharges; matching schemes; maximum power transfer; plasma impedance; power matching; radio frequency discharges; sheaths; Electrodes; Electromagnetic coupling; Electrons; Fault location; Plasma applications; Plasma devices; Plasma materials processing; Plasma sheaths; Radio frequency; Textile technology;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2003.815480
