DocumentCode
813900
Title
Variable Wave Plate via Tunable Form-Birefringent Structures
Author
Wilson, Benjamin K. ; Lin, Lih Y.
Author_Institution
Dept. of Electr. Eng., Univ. of Washington, Seattle, WA
Volume
17
Issue
4
fYear
2008
Firstpage
1039
Lastpage
1046
Abstract
We propose a compact and low-cost design for a variable wave plate using tunable form-birefringent grating structures in polydimethylsiloxane (PDMS). The described device operates through PDMS deformation via electrostatically actuated transparent electrodes. The optical and mechanical properties of tunable form-birefringent structures are modeled using birefringence, rigorous coupled-wave analysis, and simple structural mechanics theory. The device is fabricated by a form of soft nanoimprint lithography. The optical properties are characterized for different structure geometries. Operating principles were verified through testing of the completed device. The experimental results and theoretical study show that an irregular grating structure performs better than a periodic subwavelength structure. [2007-0303].
Keywords
diffraction gratings; mechanical birefringence; micro-optomechanical devices; nanolithography; optical polymers; plates (structures); soft lithography; PDMS deformation; electrostatically actuated transparent electrodes; mechanical properties; optical properties; polydimethylsiloxane; rigorous coupled-wave analysis; soft nanoimprint lithography; structural mechanics theory; tunable form-birefringent grating structures; variable wave plate; Form birefringence; nanoimprint lithography (NIL); optical polarization; tunable wave plate;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2008.927744
Filename
4573267
Link To Document