• DocumentCode
    813900
  • Title

    Variable Wave Plate via Tunable Form-Birefringent Structures

  • Author

    Wilson, Benjamin K. ; Lin, Lih Y.

  • Author_Institution
    Dept. of Electr. Eng., Univ. of Washington, Seattle, WA
  • Volume
    17
  • Issue
    4
  • fYear
    2008
  • Firstpage
    1039
  • Lastpage
    1046
  • Abstract
    We propose a compact and low-cost design for a variable wave plate using tunable form-birefringent grating structures in polydimethylsiloxane (PDMS). The described device operates through PDMS deformation via electrostatically actuated transparent electrodes. The optical and mechanical properties of tunable form-birefringent structures are modeled using birefringence, rigorous coupled-wave analysis, and simple structural mechanics theory. The device is fabricated by a form of soft nanoimprint lithography. The optical properties are characterized for different structure geometries. Operating principles were verified through testing of the completed device. The experimental results and theoretical study show that an irregular grating structure performs better than a periodic subwavelength structure. [2007-0303].
  • Keywords
    diffraction gratings; mechanical birefringence; micro-optomechanical devices; nanolithography; optical polymers; plates (structures); soft lithography; PDMS deformation; electrostatically actuated transparent electrodes; mechanical properties; optical properties; polydimethylsiloxane; rigorous coupled-wave analysis; soft nanoimprint lithography; structural mechanics theory; tunable form-birefringent grating structures; variable wave plate; Form birefringence; nanoimprint lithography (NIL); optical polarization; tunable wave plate;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2008.927744
  • Filename
    4573267