Title :
A compact V-band 2-bit reflection-type MEMS phase shifter
Author :
Kim, Hong-Teuk ; Park, Jae-Hyoung ; Yim, Jounghwa ; Kim, Yong-Kweon ; Kwon, Youngwoo
Author_Institution :
Sch. of Electr. Eng., Seoul Nat. Univ., South Korea
Abstract :
Air-gap overlay CPW couplers and low-loss series metal-to-metal contact microelectromechanical system (MEMS) switches have been employed to reduce the loss of reflection-type MEMS phase shifters at V-band. Phase shift is obtained by changing the lengths of the open-ended stubs using series MEMS switches. A 2-bit [135] reflection-type MEMS phase shifter showed an average insertion loss of 4 dB with return loss better than 11.7 dB from 50 to 70 GHz. The chip is very compact with a chip size as small as 1.5 mm /spl times/ 2.1 mm.
Keywords :
coplanar waveguide components; micromechanical devices; microwave switches; millimetre wave phase shifters; waveguide couplers; 1.5 mm; 11.7 dB; 2.1 mm; 4 dB; 50 to 70 GHz; air-gap overlay CPW couplers; compact V-band phase shifter; low-loss MEMS switches; metal-to-metal contact MEMS switches; microelectromechanical system; open-ended stubs; reflection-type MEMS phase shifter; series MEMS switches; Air gaps; Coplanar waveguides; Couplers; Frequency; Insertion loss; Micromechanical devices; Microswitches; Millimeter wave technology; Phase shifters; Switches;
Journal_Title :
Microwave and Wireless Components Letters, IEEE
DOI :
10.1109/LMWC.2002.803198
