Title :
Buckling and free oscillations of composite microresonators
Author :
Li, He ; Balachandran, B.
Author_Institution :
Dept. of Mech. Eng., Univ. of Maryland, College Park, MD, USA
Abstract :
Free oscillations of piezoelectric, microelectromechanical resonators are considered in this effort. These resonators are modeled as clamped-clamped composite structures, with stepwise varying properties across the length of the resonator. The different features of the model development are discussed, and buckling in these resonators is studied. A nonlinear analysis conducted to study oscillations about a buckled position is presented. The results of the analysis are found to compare well with the experimental observations.
Keywords :
buckling; composite materials; crystal resonators; micromechanical resonators; nonlinear equations; piezoelectric oscillations; buckled beam; composite microresonators; dynamic buckling; free oscillations; microelectromechanical resonators; model development; nonlinear analysis; piezoelectric resonator; Electrodes; Frequency; Helium; Microcavities; Microelectromechanical systems; Microstructure; Platinum; Predictive models; Vibration measurement; Vibrometers; Buckled beam; clamped-clamped piezoelectric resonator structure; dynamic buckling; microelectromechanical systems (MEMS) resonator;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2005.863598
