DocumentCode
815937
Title
Effects of switched gate bias on radiation-induced interface trap formation [MOS transistors]
Author
Saks, N.S. ; Brown, D.B. ; Rendell, R.W.
Author_Institution
US Naval Res. Lab., Washington, DC, USA
Volume
38
Issue
6
fYear
1991
fDate
12/1/1991 12:00:00 AM
Firstpage
1130
Lastpage
1139
Abstract
Switched gate bias experiments were used to test the hydrogen model for the time-dependent buildup of interface traps nit after a radiation pulse. In the hydrogen model, slow transport of radiation-induced H+ ions through the oxide to the Si/SiO2 interface is the rate-limiting step in the nit formation process. A model based on dispersive transport theory was used to numerically simulate the time-dependent H+ drift through the oxide toward the gate under negative bias, then back toward the Si/SiO2 interface under positive bias. Good agreement between the simulations and experiment is obtained for the final magnitude of ΔNit, both for positive and negative bias during irradiation. The procedure used for the numerical simulations provides only a lower bound on the transport time when the direction of the gate bias is switched during the N it buildup. This behavior is due to a memory effect in the dispersive H+ transport
Keywords
diffusion in solids; electron beam effects; insulated gate field effect transistors; interface electron states; semiconductor device testing; H+ ions; Si-SiO2 interface; dispersive transport theory; electron irradiation; memory effect; model; negative bias; numerical simulations; positive bias; radiation-induced interface trap formation; switched gate bias; time-dependent H+ drift; time-dependent buildup; transport time; Bonding; Dispersion; Electron traps; Hydrogen; Laboratories; MOSFETs; Numerical simulation; Paramagnetic resonance; Predictive models; Testing;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/23.124085
Filename
124085
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