Opposing dependence of the electron and hole gate currents in SOI MOSFETs under uniaxial strain

The influence of tensile mechanical stress on ultrathin oxide gate currents in advanced partially depleted silicon-on-insulator MOSFETs is reported. Strain is applied uniaxially, perpendicular to the direction of current flow by bending of thinned, fully processed wafers with a gate oxide thickness of less than 1.5 nm. The gate currents of the n-channel and p-channel MOSFETS are found to change linearly and in opposite (opposing) directions as a function of uniaxial strain. The nMOS transistors generally exhibit a decrease with applied tensile strain, while the nMOS transistors show increasing gate current with strain. The observed dependences are consistent with a gate current controlled by direct tunneling and perturbed by stress-induced changes in the energy band structure.