Title :
A Design Approach to 2-D Electrostatic Torsional Micromirrors With Z-Axis Displacement Compensation
Author :
Li, Lijie ; Begbie, Mark
Author_Institution :
Inst. for Syst. Level Integration, Livingston
Abstract :
We report a new method for maintaining constant z-axis displacement of an electrostatic torsional micromirror driven by quadrant electrodes, by adding an additional control electrode. The voltage applied to the control electrode is theoretically related to the voltages applied to the quadrant electrodes. The mathematical model is presented and validated through finite-element analysis
Keywords :
electro-optical devices; electrodes; electrostatic devices; micromirrors; optical design techniques; 2-D electrostatic torsional micromirrors; displacement compensation; finite-element analysis; quadrant electrodes; Biomedical electrodes; Biomedical optical imaging; Electrostatics; Finite element methods; Mathematical model; Micromechanical devices; Micromirrors; Optical devices; Optical microscopy; Voltage control; Central electrode; microelectromechanical systems (MEMS); micromirrors; z-axis displacement;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2006.886135
