DocumentCode
816642
Title
A Design Approach to 2-D Electrostatic Torsional Micromirrors With Z-Axis Displacement Compensation
Author
Li, Lijie ; Begbie, Mark
Author_Institution
Inst. for Syst. Level Integration, Livingston
Volume
18
Issue
22
fYear
2006
Firstpage
2422
Lastpage
2424
Abstract
We report a new method for maintaining constant z-axis displacement of an electrostatic torsional micromirror driven by quadrant electrodes, by adding an additional control electrode. The voltage applied to the control electrode is theoretically related to the voltages applied to the quadrant electrodes. The mathematical model is presented and validated through finite-element analysis
Keywords
electro-optical devices; electrodes; electrostatic devices; micromirrors; optical design techniques; 2-D electrostatic torsional micromirrors; displacement compensation; finite-element analysis; quadrant electrodes; Biomedical electrodes; Biomedical optical imaging; Electrostatics; Finite element methods; Mathematical model; Micromechanical devices; Micromirrors; Optical devices; Optical microscopy; Voltage control; Central electrode; microelectromechanical systems (MEMS); micromirrors; z-axis displacement;
fLanguage
English
Journal_Title
Photonics Technology Letters, IEEE
Publisher
ieee
ISSN
1041-1135
Type
jour
DOI
10.1109/LPT.2006.886135
Filename
4012064
Link To Document