Title :
Polymeric MOEMS Variable Optical Attenuator
Author :
Llobera, A. ; Villanueva, G. ; Cadarso, V.J. ; Battgenbach, S. ; Plaza, J.A.
Abstract :
In this letter, we take advantage of the high coefficient of thermal expansion (CTE) of a chemically amplified, epoxy-based negative polymer (SU-8) to define a low-power consumption polymeric variable optical attenuator that combines the working principles of microoptoelectromechanical systems and photonic lightwave circuits. The SU-8 symmetric structure comprises a seismic mass and four mechanical beams. Three multimode waveguides are defined on this structure: two of them are located on the frame and the third one in the middle of the seismic mass. Aluminum is used as a heater electrode extending over two of the mechanical beams and part of the seismic mass. When a dc voltage is applied, the mechanical beams bend, resulting in a misalignment between the waveguides. Experimental results have shown a power consumption of 12 mW at 20 dB with a working wavelength of 633nm emitted from a light-emitting diode
Keywords :
aluminium; integrated optics; micro-optics; microactuators; optical attenuators; optical polymers; thermal expansion; 12 mW; 633 nm; Al; heater electrode; microoptoelectromechanical systems; photonic lightwave circuits; polymeric MOEMS; thermal expansion expansion; variable optical attenuator; Aluminum; Chemicals; Circuits; Electrodes; Energy consumption; Optical attenuators; Optical polymers; Optical waveguides; Thermal expansion; Voltage; Electrothermal actuators; microoptoelectromechanical systems (MOEMS); polymer waveguides; variable optical attenuators (VOAs);
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2006.886134