DocumentCode
818246
Title
A combined X-ray and optical interferometer with a new translation stage
Author
Nakayama, Kan ; Tanaka, Mitsuru ; Kuroda, Kazuaki
Author_Institution
National Research Laboratory of Metrology
Volume
40
Issue
2
fYear
1991
fDate
4/1/1991 12:00:00 AM
Firstpage
108
Lastpage
109
Keywords
Actuators; Fasteners; Frequency estimation; Lattices; Optical interferometry; Silicon; Vibration measurement; Volume measurement; Wavelength measurement; X-ray diffraction;
fLanguage
English
Journal_Title
Instrumentation and Measurement, IEEE Transactions on
Publisher
ieee
ISSN
0018-9456
Type
jour
DOI
10.1109/TIM.1990.1032893
Filename
1032893
Link To Document