DocumentCode
818724
Title
Corrections to "An analytical model to project MOS transistor lifetime improvement by deuterium passivation of interface traps"
Author
Kangguo Cheng ; Lyding, Joseph W.
Author_Institution
University of Illinois
Volume
24
Issue
11
fYear
2003
Firstpage
710
Lastpage
710
Keywords
Analytical models; Annealing; Curve fitting; Deuterium; Hydrogen; MOSFETs; Metallization; Passivation; Research and development; Transistors;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/LED.2003.820017
Filename
1242336
Link To Document