Magnetic properties of Fe-Co/Fe-Co-N multilayered films with high saturation flux density

Author

Ono, Hideaki ; Fujinaga, Masashi ; Yonemoto, Takaharu ; Miyagawa, Tsugio

Author_Institution

RIMES Ltd., Chiba, Japan

Volume

28

Issue

5

fYear

1992

fDate

9/1/1992 12:00:00 AM

Firstpage

2018

Lastpage

2023

Abstract

Fe-Co/Fe-Co-N multilayered films were prepared by an alternation of RF-sputtering and electron cyclotron resonance (ECR) plasma nitridation, and the structure and magnetic properties of each were investigated. N₂ ECR plasma exposure generated nitride (ε or ζ nitride) phases with low saturation flux density on the sputtered Fe-Co layers´ surface. In these multilayered films, fine crystal grains and an expansion of the BCC (body centered cubic) lattice parameter were observed. For the optimum preparation conditions, Fe_97.2Co_2.8/Fe_97.2Co_2.8-N multilayered films demonstrated a high saturation flux density of B _s=2.0 T, a low coercivity of H_c=120 A/m, and a relative permeability of μ´>2200 at 20 MHz

Keywords

cobalt alloys; coercive force; ferromagnetic properties of substances; iron alloys; lattice constants; magnetic flux; magnetic multilayers; magnetic permeability; nitridation; sputtered coatings; ζ nitride; 20 MHz; BCC lattice parameter; ECR plasma nitridation; Fe_97.2Co_2.8-Fe_97.2Co_2.8N multilayered films; RF-sputtering; coercivity; epsilon nitride; fine crystal grains; high saturation flux density; magnetic properties; relative permeability; structure; Coercive force; Cyclotrons; Electrons; Iron; Lattices; Magnetic films; Magnetic properties; Magnetic resonance; Plasma density; Plasma properties;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.179392

Filename

179392